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     The Co-organizers list is provisional and updated on July 29th, 2021. Others Co-organizers will be added, accordingly to the progress of event organization.

School on Nanotech

 
  go to QR-CODENanoT qr code

  Updated on September 17th 2021  Registration e42824
 
 ROOM 10

 


School on nanotechnologies:

processes and applications to sensors and actuators


September 22-23-24


The School will be held both REMOTELY and IN PERSON

Chairs: Vittorio MORANDI, CNR-IMM & Lorenza FERRARIO, FBK
Co-organized with
It Fab
 

The course is dedicated to Master degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering  the opportunity to learn about fundamentals on processes, devices fabrication and characterization processes, with attention to both planar and 3D technologies. 

Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas. 

The workshop will be completed with a demo and live sessions from different cleanrooms, to practically show some of the fundamental silicon processing steps. The school is organized by It-fab (http://itfab.bo.imm.cnr.it/), the Italian network for Micro and Nano Fabrication research infrastructures.

 
Wednesday 22 September
09:00 - 09:15
Welcome and Introduction
Vittorio MORANDI, CNR-IMM, Bologna
MORANDI Vittorio
09:15 - 09:45 Cleanroom, introduction to the functioning
Lorenza FERRARIO - CV, FBK
FERRARIO Lorenza 2
09:45 - 10:30 Ionic implantation
Antonino PICCIOTTO, FBK
PICCIOTTO Antonio
break
11:30 - 12:15
Depostion techniques 1
Riccardo BERTACCO, PoliFAB
BERTACCO Riccardo
12:15 - 13:00 Depostion techniques 2

Claudio SOMASCHINIPoliFAB 

!UOMO
 break
14:00 - 14:45 Plasma Etching 1
Fulvio MANCARELLA, CNR-IMM
!UOMO
14:45 - 15:30 Plasma Etching 2
Fulvio MANCARELLA, CNR-IMM
!UOMO
break 
16:00 - 16:45 Lithography 1
Massimo CUSCUNA', CNR NANOTEC
CUSCUNA Massimo
16:45 - 17:30 Lithography 2
Massimo CUSCUNA', CNR NANOTEC
CUSCUNA Massimo
 
Thursday 23 September
 09:00 - 09:45 Self-assembling lithography for nanoscale metrology
Federico FERRARESE LUPI, INRIM
!UOMO
09.45 - 10.30
Metrology in Nanotechnologies
Davide CALONICO, INRIM
!UOMO
break
11:30 - 12:15 Suspended structures: patterning and release
Ilaria GELMI, STMicroelectronics
!DONNA
12:15 - 13:00 When 3D process integration turns into 3D optical sensing
Emmanuel JOSSE, STMicroelectronics
JOSSE Emmanuel
 break
14:00 - 14:45 Technology Platform 2 - Organic electronics and applications
Matteo RAPISARDA, CNR-IMM, Roma
!UOMO
14:45 - 15:30 Technology Platform 4/Scanning Probe Lithography
Alessia ROMEO, PoliFAB
!DONNA
break
16:00 - 16:45 Technology Platform 5 - Two photon polymerization 3D printing
Valentina BERTANA, Chilab & Polytechnic of Turin
!DONNA
16:45 - 17:30 Discussion and Conclusion  
 
Friday 24 September
09:00 - 09:45 LIVE DEMO - CNR NANOTEC
Massimo CUSCUNA', CNR NANOTEC
CUSCUNA Massimo
09.45 - 10.30 LIVE DEMO - SEM/FIB FBK
Damiano GIUBERTONI, FBK
!UOMO
break
11:00 - 11:30 APPLICATIONS - Applications 1: System level 3D integration and system-in-package for chemical sensing microsystems
Stefano ZAMPOLLI - CVCNR-IMM, Bologna
!UOMO
11:30 - 12:00 APPLICATIONS - Applications 2: Microfluidics and biosensors
Simone MARASSO, Polytechnic of Turin
MARASSO Simone
12:00 - 12:30 APPLICATIONS - Applications 3: Fabrication of micro-vibrating wire strain sensors by micromachining of Silicon On Insulator substrates with wafer-level vacuum packaging
Alberto RONCAGLIA, CNR-IMM
!UOMO
 


The School will send a certificate of participation with the programme and the total number of lessons hours. The document will be sent to registered people only and has to be requested explicitly to This email address is being protected from spambots. You need JavaScript enabled to view it.


  

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PROGRAM BOOK

ProgramBook copertina minUpdated on September 18th 2021

ORGANIZERS

 

AIRI

 

Associazione NanoItaly 300

 

INSTITUTIONAL PARTNERS

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SCIENTIFIC PATRONAGES


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INSTITUTIONAL PATRONAGES

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IN COOPERATION WITH

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